Shower head optimization – semiconductor (J. Intell. Manuf., 2024)

Publication info

​Jin, Z., Lim, D. D., Zhao, X., Mamunuru, M., Roham, S., & Gu, G. X.; “Machine learning enabled optimization of showerhead design for semiconductor deposition process”. Journal of Intelligent Manufacturing, 2024 [Link]

Publication Link

https://link.springer.com/article/10.1007/s10845-023-02082-8